Sub-Half-Micron Lithography for ULSIs

Katsumi Suzuki (Editor); Shinji Matsui (Editor); Yukinori Ochiai (Editor)

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Author
Katsumi Suzuki (Editor); Shinji Matsui (Editor); Yukinori Ochiai (Editor)
Publish Date
2000-06-01
Book Type
Hardcover
Number of Pages
342
Publisher Name
54
ISBN-10
0521570808
ISBN-13
9780521570800
citemno
074364
SKU
9780521570800