Silicon Micromachining

Author

M. Elwenspoek; H. Jansen

Publish Date

1999-05-13

Edition

Cambridge Studies in Semiconductor Physics and Microelectronic Engineering

Book Type

Hardcover

Number of Pages

420

Publisher Name

54

ISBN-10

052159054X

ISBN-13

9780521590549

citemno

086350

SKU

9780521590549